Ellipsometry Heating and Cooling Stage

The ellipsometer temperature‑controlled stage is a versatile platform designed for integration with ellipsometers. It finds applications across diverse fields, including semiconductors, thin‑film devices, functional coatings, polymers, and biomaterials, playing an indispensable role—particularly in studying material phase transitions, assessing thermal stability, and validating functional properties.

Technical Specifications Product Features Download Materials

Project	TT600C-EM	TS600C-EM
Cooling method	None	Liquid nitrogen
Temperature range	RT-600℃	-196 to 550°C
Temperature resolution	0.1℃	0.1℃
Temperature control accuracy	±0.1℃	±0.1℃
Sample area	25*25mm	30*30mm
Maximum heating rate	200℃/min	50℃/min
Maximum cooling rate	Natural cooling	-40℃/min
Angle of incidence	65° (57°–72°) or 70°
Aperture diameter	18mm
Window material	Stress-free quartz glass

Supports wide-temperature-range adjustment, from -190°C to 600°C.
It employs digital PID temperature control technology, resulting in minimal temperature fluctuations.