TC504-VA

A vacuum heating stage is a device that integrates vacuum‑environment control and precise temperature regulation, and is widely used in the semiconductor and electronics industries for wafer annealing, degassing during chip packaging, curing of electronic pastes, and high‑temperature stability testing of sensor components. In materials science, it is employed for the synthesis and heat treatment of nanomaterials, vacuum annealing following thin‑film deposition, and vacuum curing of composite materials, among other applications.

Technical Specifications Product Features Download Materials

◎ It adopts a split‑type design, comprising two main components: a vacuum chamber and a temperature‑control unit.
◎ A novel digital heating design enables precise control of the surface temperature;
◎ Independent overheat protection circuit design ensures test safety;
◎ This model can be extended to accommodate large‑area cryogenic stages in vacuum environments, making it suitable for applications such as low‑temperature probe stations and material processing.
Attachment: vacuum pump, vacuum piping, vacuum gauge, valves, and other components.